Fabrication of buried nanostructures by atomic layer deposition

Fabrication of hafnia hollow nanofibers by atomic layer deposition using electrospun nanofiber templates

Hafnia (HfO2) hollow nanofibers (HNs) were synthesized by atomic layer deposition (ALD) using electrospun nylon 6,6 nanofibers as templates. HfO2 layers were deposited on polymeric nanofibers at 200 C by alternating reactant exposures of tetrakis(dimethylamido)hafnium and water. Polymeric nanofiber templates were subsequently removed by an ex situ calcination process at 500 C under air ambient....

Fabrication of AlN/BN bishell hollow nanofibers by electrospinning and atomic layer deposition

Sub-5 nm nanostructures fabricated by atomic layer deposition using a carbon nanotube template.

The fabrication of nanostructures having diameters of sub-5 nm is very a important issue for bottom-up nanofabrication of nanoscale devices. In this work, we report a highly controllable method to create sub-5 nm nano-trenches and nanowires by combining area-selective atomic layer deposition (ALD) with single-walled carbon nanotubes (SWNTs) as templates. Alumina nano-trenches having a depth of ...

Uniform Fe3O4 coating on flower-like ZnO nanostructures by atomic layer deposition for electromagnetic wave absorption.

An elegant atomic layer deposition (ALD) method has been employed for controllable preparation of a uniform Fe3O4-coated ZnO (ZnO@Fe3O4) core-shell flower-like nanostructure. The Fe3O4 coating thickness of the ZnO@Fe3O4 nanostructure can be tuned by varying the cycle number of ALD Fe2O3. When serving as additives for microwave absorption, the ZnO@Fe3O4-paraffin composites exhibit a higher absor...

Sacrificial-Layer Atomic Layer Deposition for Fabrication of Non-Close-Packed Inverse-Opal Photonic Crystals

Photonic crystals have been studied extensively for their potential to control and manipulate light, similar to the way electrons are controlled in a semiconductor, opening the door to high-speed, low-power, all-optical devices. A common method for fabricating 3D photonic crystals is the infiltration and subsequent inversion of synthetic opal templates to create inverse opals consisting of air ...